| Course Content | Lecture and Tutorial |
| Level | Hauptstudium / Master |
| Semester | Sommer Semester |
| Creditpoints | 5 CP |
Course Goal
The aim of the lecture is to impart knowledge about the most important application areas of microtechnology. A microtechnical system has the components microsensorics, microactuators and microelectronics. The working principle and structure of the micro components as well as requirements of system integration are taught.
Course Content
- Functional principles of microsensors and actuators
- Basics of microtribology
- Introduction to semiconductor technology
- Applications of microsystems technology in the fields of
- Automotive engineering
- Optical systems
- Industrial automation and biomedical engineering
- Aerospace technology
- Quantum technology
