"Mikro- und Nanosysteme"

Course Content
Lecture and Tutorial

Hauptstudium / Master

SemesterSommer Semester
Creditpoints5 CP

Course Goal

The aim of the lecture is to impart knowledge about the most important application areas of microtechnology. A microtechnical system has the components microsensorics, microactuators and microelectronics. The working principle and structure of the micro components as well as requirements of system integration are taught.

Course Content

  • Functional principles of microsensors and actuators
  • Basics of microtribology
  • Introduction to semiconductor technology
  • Applications of microsystems technology in the fields of
    • Automotive engineering
    • Optical systems
    • Industrial automation and biomedical engineering
    • Aerospace technology
    • Quantum technology

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