"Mikro- und Nanosysteme"

The aim of the lecture is to impart knowledge about the most important application areas of microtechnology. A microtechnical system has the components microsensorics, microactuators and microelectronics. The working principle and structure of the micro components as well as requirements of system integration are taught.

• Functional principles of microsensors and actuators
• Basics of microtribology
• Introduction to semiconductor technology
• Applications of microsystems technology in the fields of
  • Automotive engineering
  • Optical systems
  • Industrial automation and biomedical engineering
  • Aerospace technology
  • Quantum technology