Publications at the Institute of Micro Production Technology

Showing results 1 - 100 out of 279

2024


IMPT entwickelt Transformatoren auf Kunststoffbasis für Elektroautos. / Bierwirth, Tim Nils.
In: phi – Produktionstechnik Hannover informiert, 03.2024.

Research output: Contribution to journalArticleResearch

Integrated multimode optical waveguides in glass using laser induced deep etching. / Reitz, Birger; Evertz, Andreas; Basten, Robin et al.
In: Applied optics, Vol. 63, No. 4, 01.02.2024, p. 895-903.

Research output: Contribution to journalArticleResearchpeer review


2023


Sensoren richtig positioniert. / Denkena, Berend; Klemme, Heinrich; Kowalke, Dennis et al.
In: Konstruktion und Entwicklung, Vol. 2023, No. 6, 07.11.2023, p. 42-45.

Research output: Contribution to journalArticleResearch

Manufacturing of a Reluctance Actuator for Use as a Hearing Implant in the Middle Ear. / Müller, Eileen; Adamscheck, Marco (Contributor); Fischer, Eike Christian (Contributor) et al.
2023. Poster session presented at MikroSystemTechnik Kongress 2023, Dresden, Germany.

Research output: Contribution to conferencePosterResearch

Microtechnological Production of Integrated Optical Gratings Using Laser Beam Lithography for Atomic Interferometers. / de Wall, Sascha; Kassner, Alexander; Dencker, Folke et al.
2023.

Research output: Contribution to conferencePosterResearch

Performance Comparison of MR Sensors on Silicon and Bare PEEK (Polyether Ether Ketone) Wafers. / de Wall, Sascha; Bierwirth, Tim Nils; Wurz, Marc et al.
2023. Poster session presented at MikroSystemTechnik Kongress 2023, Dresden, Germany.

Research output: Contribution to conferencePosterResearch

Detailed characterisation of batch-manufactured flexible micro-grinding tools for electrochemical assisted grinding of copper surfaces. / Steinhoff, Lukas; Ottermann, Rico; Dencker, Folke et al.
In: The International Journal of Advanced Manufacturing Technology, Vol. 128, No. 5-6, 09.2023, p. 2301-2310.

Research output: Contribution to journalArticleResearchpeer review

Direct Sensor Integration on the Raceway of Roller Bearings. / Pape, Florian; Konopka, Dennis; Coors, Timm et al.
Gesellschaft für Tribologie e.V. (GfT), 2023. 9 p.

Research output: Book/ReportConference proceedingResearch

Mädchen und Technik: Seid MuTig und erlebt Technik hautnah! / Müller, Eileen; Ottermann, Rico.
In: phi – Produktionstechnik Hannover informiert, 01.08.2023.

Research output: Contribution to specialist publicationContribution in popular science journalTransfer

Characterization of the tribologically relevant cover layers formed on copper in oxygen and oxygen-free conditions. / Raumel, Selina; Barienti, Khemais; Luu, Hoang Thien et al.
In: Friction, Vol. 11, No. 8, 08.2023, p. 1505–1521.

Research output: Contribution to journalArticleResearchpeer review

Novel Glass-Silicon Emitter Chip for Field Emission Applications. / Buchta, Aleksandra M.; Kassner, Alexander; Voß, Julia et al.
2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC). IEEE, 2023. p. 207-209 ( International Vacuum Nanoelectronics Conference).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Micro-integrated optical systems and qualification of adhesive integration technologies for cold atomic quantum sensors. / Christ, M.; Stiekel, A.; Stölmacker, C. et al.
International Conference on Space Optics, ICSO 2022. ed. / Kyriaki Minoglou; Nikos Karafolas; Bruno Cugny. SPIE, 2023. 1277718 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12777).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Enhanced findability and reusability of engineering data by contextual metadata. / Altun, Osman; Oladazimi, Pooya; Wawer, Max Leo et al.
In: Proceedings of the Design Society, Vol. 3, 19.06.2023, p. 1635-1644.

Research output: Contribution to journalConference articleResearchpeer review

Force sensing linear rolling guides based on modified metal strain gauges. / Denkena, Berend; Klemme, Heinrich; Kowalke, Dennis et al.
2023. Paper presented at 23rd International Conference of the European Society for Precision Engineering and Nanotechnology (euspen), Copenhagen, Denmark.

Research output: Contribution to conferencePaperResearchpeer review

Soliton compression and supercontinuum spectra in nonlinear diamond photonics. / Melchert, O.; Kinnewig, S.; Dencker, F. et al.
In: Diamond and Related Materials, Vol. 136, 109939, 06.2023.

Research output: Contribution to journalArticleResearchpeer review

Influence of Microscale Tin Particles on Mechanical Properties of Silver Sintering Joints with Reduced Processing Parameters. / Hadeler, Steffen; Long, Yangyang; Ottermann, Rico et al.
2023 IEEE 73rd Electronic Components and Technology Conference (ECTC): Proceedings. Institute of Electrical and Electronics Engineers Inc., 2023. p. 676-681 (Proceedings - Electronic Components Conference).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Application of batch manufactured flexible micro-grinding tools on copper and oxidized copper surfaces. / Steinhoff, Lukas; Dencker, Folke; Wurz, Marc Christopher.
In: Tribologie und Schmierungstechnik, Vol. 70, No. 1, 27.03.2023, p. 5-10.

Research output: Contribution to journalArticleResearchpeer review

Detection of joining mechanisms at different locations of the wire/substrate interface during ultrasonic wire bonding via a PZT-based sensor array. / Long, Yangyang; Arndt, Matthias; Sun, Chen et al.
In: Journal of Materials Processing Technology, Vol. 312, 117826, 03.2023.

Research output: Contribution to journalArticleResearchpeer review

Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process. / Wittek, Christian-G R.; Steinhoff, Lukas; Raumel, Selina et al.
In: Micromachines, Vol. 14, No. 3, 580, 28.02.2023.

Research output: Contribution to journalArticleResearchpeer review

Monitoring of the Flange Draw-In During Deep Drawing Processes Using a Thin-Film Inductive Sensor. / Fünfkirchler, T.; Arndt, M.; Hübner, S. et al.
Lecture Notes in Production Engineering. Springer Nature, 2023. p. 111-121 (Lecture Notes in Production Engineering; Vol. Part F1163).

Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearchpeer review

Herstellung miniaturisierter Ionengetterpumpen am IMPT. / Buchta, Aleksandra Monika.
In: phi – Produktionstechnik Hannover informiert, No. 38, 01.02.2023.

Research output: Contribution to specialist publicationContribution in popular science journalTransfer

Advancements in monitoring of tribological stress in bearings using thin-film strain gauges. / Konopka, Dennis; Steppeler, Tobias; Ottermann, Rico et al.
2023. 1623-1634 Paper presented at 10th ECCOMAS Thematic Conference on Smart Structures and Materials.

Research output: Contribution to conferencePaperResearchpeer review

Development of a device for the determination of local magnetic properties of thin films on whole wafers. / Fischer, Eike Christian.
Hannover: Leibniz Universität Hannover, 2023. 143 p.

Research output: ThesisDoctoral thesis

Influence of oxide layers on the mechanical properties of copper. / Raumel, Selina; Wolf, Anna-Marleen; Dencker, Folke et al.
Tagungsband, 5. Symposium Materialtechnik : Fortschrittbericht der Materialforschung und Werkstofftechnik . Clausthaler Zentrum für Materialtechnik, 2023. p. 149-159 (Fortschrittsberichte der Materialforschung und Werkstofftechnik; Vol. 12).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Measurement of the Ultrasound Induced Temperature Change in an Ultrasonic Assisted Silver Sintering Process. / Hadeler, Steffen; Long, Yangyang; Twiefel, Jens et al.
IEEE Sensors 2023 Conference Proceedings. IEEE, 2023. (Proceedings of IEEE Sensors).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Miniaturized quantum systems for inertial measurement units. / Kassner, A.; Diekmann, L.; Künzler, C. et al.
2023 DGON Inertial Sensors and Systems (ISS). ed. / Peter Hecker. IEEE, 2023. (International Symposium on Inertial Sensors and Systems).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Oxygen-free resistance heating with nitrogen and silane as an energy-efficient heating process for hot stamping. / Behrens, Bernd-Arno; Hübner, Sven; Holländer, Ulrich et al.
In: IOP Conference Series: Materials Science and Engineering, Vol. 1284, 012007, 2023.

Research output: Contribution to journalConference articleResearchpeer review

Physical Sensors: Magnetic Sensors. / Prediger, Maren Susanne; Wurz, Marc.
Encyclopedia of Sensors and Biosensors. Vol. 1 Elsevier Inc., 2023. p. 97-110.

Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearch

Sensor Inserts on Spherical Surfaces for Temperature Measurement in Wear Contacts. / Raumel, Selina; Wurz, Marc Christopher.
2023 IEEE SENSORS. IEEE, 2023. p. 1-4 (Proceedings of IEEE Sensors).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Simulation, Manufacturing and Evaluation of a Transformer Eddy-Current Sensor for Deep-Drawing Processes. / Kamrani, Sara; Ottermann, Rico; Dencker, Folke et al.
SMSI 2023. AMA Association for Sensors and Measurement , 2023. p. 284 -285.

Research output: Chapter in book/report/conference proceedingOther contribution in a book, report, anthology or conference proceedingResearch


2022


Development and investigation of tin coatings for increased bone cement detachment at implant interfaces. / Prediger, Maren S.; Müller, Eileen; Reulbach, Magnus et al.
2022. Poster session presented at 1st International SIIRI Symposium, Hannover, Lower Saxony, Germany.

Research output: Contribution to conferencePosterResearch

Berufsfeld Wissenschaft und Technik: Ein erster Einblick nach der Schule. Sommer, Lana (Author); Prediger, Maren S. (Author); Rosenbusch, Daniel (Author). 2022.

Research output: Non-textual formWeb publication/siteCommunication

Young’s Modulus and Residual Stresses of Oxide-Free Wire Arc Sprayed Copper Coatings. / Rodriguez Diaz, Manuel; Raumel, Selina; Wurz, Marc Christopher et al.
In: COATINGS, Vol. 12, No. 10, 1482, 06.10.2022.

Research output: Contribution to journalArticleResearchpeer review

Degeneration Effects of Thin-Film Sensors after Critical Load Conditions of Machine Components. / Ottermann, Rico; Steppeler, Tobias; Dencker, Folke et al.
In: Machines, Vol. 10, No. 10, 870, 27.09.2022.

Research output: Contribution to journalArticleResearchpeer review

Drucksensoren aus Glas: IMPT gewinnt „Best Session Paper“. / Prediger, Maren S.
In: phi – Produktionstechnik Hannover informiert, 23.09.2022.

Research output: Contribution to journalLetterTransfer

Fabrication of a Low Profile Planar Transformer Using Molded Interconnect Device Technology. / Bierwirth, Tim Nils; Dencker, Folke; Fischer, Eike Christian et al.
2022 IEEE 9th Electronics System-Integration Technology Conference, ESTC 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2022. p. 129-133 (2022 IEEE 9th Electronics System-Integration Technology Conference, ESTC 2022 - Proceedings).

Research output: Chapter in book/report/conference proceedingConference contributionResearch

Impact of surface texture on ultrasonic wire bonding process. / Long, Yangyang; Arndt, Matthias; Dencker, Folke et al.
In: Journal of Materials Research and Technology, Vol. 20, 09.2022, p. 1828-1838.

Research output: Contribution to journalArticleResearchpeer review

Nonevaporable getter-MEMS for generating UHV conditions in small volumina. / Diekmann, Leonard Frank; Kassner, Alexander; Dencker, Folke et al.
In: Journal of Vacuum Science and Technology B, Vol. 40, No. 5, 054202, 09.2022.

Research output: Contribution to journalArticleResearchpeer review

High temperature nanoindentation of iron: Experimental and computational study. / Khvan, T.; Noels, L.; Terentyev, D. et al.
In: Journal of nuclear materials, Vol. 567, 153815, 15.08.2022.

Research output: Contribution to journalArticleResearchpeer review

Herstellung und Evaluierung von Mikroschleifstiften. / Steinhoff, Lukas.
In: phi – Produktionstechnik Hannover informiert, Vol. 36, 22.07.2022.

Research output: Contribution to specialist publicationContribution in popular science journalTransfer

Nanoindentation in alumina coated Al: Molecular dynamics simulations and experiments. / Luu, Hoang Thien; Raumel, Selina; Dencker, Folke et al.
In: Surface and Coatings Technology, Vol. 437, 128342, 15.05.2022.

Research output: Contribution to journalArticleResearchpeer review

Characterization of Microtransformers with Magnetic Ni-Fe-W alloy Cores Plated at Two Different Substrate Temperatures. / Mundotiya, Brij Mohan; Dinulovic, Dragan; Rissing, Lutz et al.
In: Sensors and Actuators A: Physical, Vol. 338, 113454, 01.05.2022.

Research output: Contribution to journalArticleResearchpeer review

Residual Stresses from Incremental Hole Drilling Using Directly Deposited Thin Film Strain Gauges. / Heikebrügge, S.; Ottermann, R.; Breidenstein, B. et al.
In: Experimental mechanics, Vol. 62, No. 4, 04.2022, p. 701-713.

Research output: Contribution to journalArticleResearchpeer review

Effect of PEG functionalization on the saturation magnetization of magnetic nanoporous core-shell nanoparticles. / Herrmann, T.; Schierz, A. K.; Prediger, M. et al.
In: International Journal on Magnetic Particle Imaging, Vol. 8, No. 1, 2203009, 21.03.2022.

Research output: Contribution to journalArticleResearchpeer review

Entwicklung eines piezoelektrischen Kraftsensor-Arrays. / Arndt, Matthias.
In: phi – Produktionstechnik Hannover informiert, Vol. 34, 03.2022.

Research output: Contribution to specialist publicationContribution in popular science journalTransfer

Approaches for a Solely Electroless Metallization of Through-Glass Vias. / Zawacka, Aleksandra Monika; Prediger, Maren Susanne; Kassner, Alexander et al.
2022 IEEE 72nd Electronic Components and Technology Conference (ECTC). IEEE, 2022. p. 889-897 (Proceedings - Electronic Components and Technology Conference; Vol. 2022-May).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Entwicklung eines lithographiefreien Fertigungsverfahrens für AMR-Magnetfeldsensoren basierend auf spritzgegossenen Kunststoffsubstraten. / Bengsch, Sebastian.
Garbsen: TEWISS Verlag, 2022. 136 p.

Research output: ThesisDoctoral thesis

In Situ Resistance Trimming of Directly Deposited Thin-Film Strain Gauges. / Ottermann, Rico; Zhang, Shuowen; Denkena, Berend et al.
2022 IEEE Sensors, SENSORS 2022 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2022. (Proceedings of IEEE Sensors; Vol. 2022-October).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Production and characterisation of batch manufactured flexible micro-grinding tools for finishing metallic surfaces. / Steinhoff, Lukas; Dencker, Folke; Wurz, Marc Christopher.
European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. ed. / Richard K. Leach; A. Akrofi-Ayesu; C. Nisbet; Dishi Phillips. euspen, 2022. p. 77-80 (European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Tiefziehen mit integrierter induktiver Flanscheinzugssensorik in Dünnschichttechnik: Schlussbericht vom 28.02.2022 zu IGF-Vorhaben Nr. 20468 N : Berichtszeitraum: 01.03.2019 bis 31.08.2021. / Fünfkirchler, Timo; Pfeffer, Chris; Micke-Camuz, Moritz et al.
Düsseldorf: Forschungsvereinigung Stahlanwendung e.V. (FOSTA), 2022. (Forschung für die Praxis / Forschungsvereinigung Stahlanwendung e.V; Vol. 1217).

Research output: Book/ReportOther reportResearch


2021


Microfabrication of Alkali Vapor MEMS Cells for chip-scale atomic clock. / Kazakin, A.; Kleimanov, R.; Komarevtsev, I. et al.
In: Journal of Physics: Conference Series, Vol. 2103, No. 1, 012188, 14.12.2021.

Research output: Contribution to journalConference articleResearchpeer review

Werkzeugmaschinen werden intelligent. / Klaproth, Markus Sebastian; Denkena, Berend; Bergmann, Benjamin et al.
In: Werkzeugmaschinen, 27.10.2021.

Research output: Contribution to specialist publicationContribution in non-scientific journalTransfer

Strain-induced doping and zero line mode at the fold of twisted Bernal-stacked bilayer graphene. / Hong, Sung Ju; Xiao, Xiao; Wulferding, Dirk et al.
In: 2D Materials, Vol. 8, No. 4, 045009, 18.10.2021.

Research output: Contribution to journalArticleResearchpeer review

Zeigt euren MuT: Mädchen und Technik ist wieder da! / Raumel, Selina; Ottermann, Rico.
In: phi – Produktionstechnik Hannover informiert, 13.08.2021.

Research output: Contribution to specialist publicationContribution in popular science journalTransfer

Experimental Investigation of the Rapid Fabrication of Micronand Submicron Structures on Polymers Utilizing Ultrasonic Assisted Embossing. / Zhu, Yongyong; Bengsch, Sebastian; Zheng, Lei et al.
In: Polymers, Vol. 13, No. 15, 2417, 01.08.2021.

Research output: Contribution to journalArticleResearchpeer review

Entwicklung eines piezoelektrischen Aluminiumnitrid-Dünnfilms. / Steinhoff, Lukas.
In: phi – Produktionstechnik Hannover informiert, Vol. 32, 23.07.2021.

Research output: Contribution to specialist publicationContribution in popular science journalTransfer

Towards a Highly Sensitive Piezoelectric Nano-Mass Detection: A Model-Based Concept Study. / Twiefel, Jens; Glukhovskoy, Anatoly; de Wall, Sascha et al.
In: Sensors, Vol. 21, No. 7, 2533, 04.04.2021.

Research output: Contribution to journalArticleResearchpeer review

Einfluss von Silan-dotierten Umgebungsatmosphären auf tribologischen Eigenschaften von Titan. / Raumel, Selina; Barienti, Khemais; Dencker, Folke et al.
In: Tribologie und Schmierungstechnik, Vol. 68, No. 1, 22.03.2021, p. 5-13.

Research output: Contribution to journalArticleResearchpeer review

Verfahren zur Herstellung von Diamantspitzen. / Dencker, Folke (Inventor); Wurz, Marc Christopher (Inventor); Maier, Hans Jürgen (Inventor).
Patent No.: DE102019213043. Mar 04, 2021.

Research output: Patent

Einfluss von Silan-dotierten Umgebungsatmosphären auf tribologischen Eigenschaften von Titan. / Raumel, Selina; Barienti, Khemais; Dencker, Folke et al.
In: Tribologie und Schmierungstechnik, Vol. 68, No. 1, 03.2021, p. 5-13.

Research output: Contribution to journalArticleResearchpeer review

Sensorbauteil, Halbzeug, Verfahren zur Anbringung und zur Herstellung eines Sensorbauteils. / Dencker, Folke (Inventor); Wurz, Marc Christopher (Inventor); Maier, Hans Jürgen (Inventor) et al.
Patent No.: DE102019122623. Feb 25, 2021.

Research output: Patent

Anisotropic Magneto-Resistive Sensor Effect based Sensor using Daisy Chain on Polyether Ether Ketone Substrate. / De Wall, Sascha; Bengsch, Sebastian; Fischer, Eike et al.
2021 IEEE Sensors. Institute of Electrical and Electronics Engineers Inc., 2021. (Proceedings of IEEE Sensors; Vol. 2021-October).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Combination of Additive and Thin-Film Technological Manufacturing for the Realization of a Pressure Sensor for Biomedical Applications. / Prediger, Maren S.; Müller, Eileen; Bengsch, Sebastian et al.
MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, 2021. p. 578-581 (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Development of a Polyimid Membrane for Electromagnetic Middle-Ear Actuators. / Glukhovskoy, Anatoly; Müller, Eileen; Prediger, Maren S. et al.
MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, 2021. p. 186-189 (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Directly Deposited Thin-Film Strain Gauges on Curved Metallic Surfaces. / Ottermann, Rico; Klaas, Daniel; Dencker, Folke et al.
2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2021. (Proceedings of IEEE Sensors; Vol. 2021-October).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Direktabgeschiedene Dünnfilm-Dehnungsmessstreifen für erhöhte Temperaturen. / Ottermann, Rico; Klaas, Daniel; Dencker, Folke Enno et al.
MikroSystemTechnik Kongress 2021: Proceedings. Berlin: VDE Verlag GmbH, 2021. p. 315-316.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Direktabgeschiedene Dünnfilmsensorik mithilfe einer neuartigen Beschichtungsanlage. / Ottermann, Rico; Klaas, Daniel; Dencker, Folke Enno et al.
27. NDVaK-Kolloquium. Dresden, 2021.

Research output: Chapter in book/report/conference proceedingConference contributionResearch

Fabrication of a Low Profile Planar Transformer Using a Dual PCB Approach. / Fischer, Eike Christian; Bierwirth, Tim Nils; Dencker, Folke et al.
MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, 2021. p. 483-486 (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).

Research output: Chapter in book/report/conference proceedingConference contributionResearch

Film transfer from thin films to metal surfaces using sol-gels, self-assembling monolayers and water glass. / Basten, R.G.; Zawacka, A.M.; Bengsch, S. et al.
MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, 2021. p. 27-30.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Investigation of tribologically relevant surface layers formed on non-ferrous metals in oxygen-free conditions. / Raumel, Selina; Dencker, Folke; Wurz, Marc.
2021. Abstract from European Symposium on Friction, Wear and Wear Protection .

Research output: Contribution to conferenceAbstractResearch

Investigations on Silver Sintering using an Ultrasonic Transient Liquid Phase Sintering Process. / Hadeler, Steffen; Seefisch, Henning; Ottermann, Rico et al.
2021 IEEE 23rd Electronics Packaging Technology Conference (EPTC). Institute of Electrical and Electronics Engineers Inc., 2021. p. 288-291.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Mikrotechnologische Fertigung von integrierten optischen Gittern mittels Lift-Off-Prozess für den Einsatz in Atominterferometern. / de Wall, S.; Kassner, A.; Dencker, F. et al.
MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, 2021. p. 466-468 (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Modellierung und Herstellung eines akustischen Wandlers auf Waferniveau unter Einsatz von Polymermembranen. / Kaiser, Matthias.
Garbsen: TEWISS Verlag, 2021. 118 p.

Research output: ThesisDoctoral thesis

Proof of Concept: Glass-Membrane Based Differential Pressure Sensor. / Glukhovskoy, Anatoly; Prediger, Maren Susanne; Schäfer, Jennifer et al.
2021 IEEE 71st Electronic Components and Technology Conference (ECTC). IEEE, 2021. p. 1563-1570 (Proceedings - Electronic Components and Technology Conference; Vol. 2021-June).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

SiC-Mikrofräswerkzeuge für die Mikrobearbeitung. / Asadi, Esmail.
Garbsen: TEWISS Verlag, 2021. 114 p.

Research output: ThesisDoctoral thesis

Simulationsgestützte Auslegung und Fertigung von piezoelektrischen Kraftsensor-Arrays zur Untersuchung des Ultraschall-Drahtbondprozesses. / Arndt, Matthias; Wurz, Marc Christopher; Dencker, Folke et al.
MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, 2021. p. 742-745 (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Technologieentwicklung zur Direktabscheidung und Strukturierung von Sensorik auf insbesondere Großbauteilen am Beispiel von Dehnungsmessstreifen. / Klaas, Daniel.
Garbsen: TEWISS Verlag, 2021. 156 p.

Research output: ThesisDoctoral thesis


2020


VERFAHREN UND VORRICHTUNG ZUM BESTIMMEN EINER KONZENTRATION. / WURZ, Marc, Christopher (Inventor); Glukhovskoy, Anatoly (Inventor); Schnebeck, Thorsten (Inventor) et al.
Patent No.: EP3746773. Dec 09, 2020.

Research output: Patent

Verfahren zur Herstellung eines Formkörpers und Bauteil mit elektrischer Funktionalität. / Maier, Hans Jürgen (Inventor); Wurz, Marc Christopher (Inventor); Bengsch, Sebastian (Inventor).
Patent No.: DE102019113973. Nov 26, 2020.

Research output: Patent

Transfer Printing of Conductive Thin-Films on PDMS with Soluble Substrates for Flexible Biosensors. / Hadeler, Steffen; Bengsch, Sebastian; Prediger, Maren et al.
In: Engineering Proceedings, Vol. 2, No. 1, 14.11.2020, p. 8181.

Research output: Contribution to journalConference articleResearchpeer review

Verschleiß-Untersuchung in sauerstofffreier Atmosphäre. / Raumel, Selina.
In: phi – Produktionstechnik Hannover informiert, Vol. 28, 07.08.2020.

Research output: Contribution to specialist publicationContribution in popular science journalTransfer

Development, characterisation and high-temperature suitability of thin-film strain gauges directly deposited with a new sputter coating system. / Klaas, Daniel; Ottermann, Rico; Dencker, Folke et al.
In: Sensors (Switzerland), Vol. 20, No. 11, 3294, 10.06.2020, p. 1-15.

Research output: Contribution to journalArticleResearchpeer review

Magnetkopf, Verfahren zur Speicherung von Information sowie Erzeugnis. / Rechel, Mathias (Inventor); Taptimthong, Piriya (Inventor); Wurz, Marc Christopher (Inventor).
Patent No.: DE102018116896. Jan 16, 2020.

Research output: Patent

Einrichtung mit einem elektrischen Bauteil sowie Verfahren zu deren Herstellung. / Maier, Hans Jürgen (Inventor); Wurz, Marc Christopher (Inventor); Bengsch, Sebastian (Inventor) et al.
Patent No.: DE102018116182. Jan 09, 2020.

Research output: Patent

Direct Deposition of Thin-Film Strain Gauges with a New Coating System for Elevated Temperatures. / Ottermann, Rico; Klaas, Daniel; Dencker, Folke et al.
IEEE Sensors, SENSORS 2020: Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2020. 9278661.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Flexibel und druckempfindlich: Sensoren für die Insertionsüberwachung in der Cochlea. / Prediger, Maren; Wurz, Marc Christopher.
Hannover: Leibniz Universität Hannover. 2020.

Research output: Other contributionOther publicationResearchpeer review

Giant Magneto-Resistive Effect based Sensor on Laser Direct Structured MID Substrates. / Fischer, Eike Christian; Bengsch, Sebastian; De Wall, Sascha et al.
Proceedings: IEEE 70th Electronic Components and Technology Conference, ECTC 2020. Institute of Electrical and Electronics Engineers Inc., 2020. p. 439-444 9159426 (Proceedings - Electronic Components and Technology Conference; Vol. 2020-June).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Heat-Assisted Magnetic Storage on Component Surfaces. / Taptimthong, Piriya.
Garbsen: TEWISS Verlag, 2020. 135 p.

Research output: ThesisDoctoral thesis

Mikrotechnologische Fertigung von integrierten optischen Gittern für den Einsatz in Atominterferometern. / de Wall, S.; Kassner, A.; Dencker, F. et al.
GMM-Fb. 97: Mikro-Nano-Integration. Berlin: VDE Verlag GmbH, 2020. p. 56-59 (GMM-Fachberichte).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Novel Piezoelectric Force Sensor Array for Investigation of Ultrasonic Wire Bonding. / Arndt, Matthias; Long, Yangyang; Dencker, Folke et al.
Proceedings: IEEE 70th Electronic Components and Technology Conference, ECTC 2020. Institute of Electrical and Electronics Engineers Inc., 2020. p. 276-283 9159495 (Proceedings - Electronic Components and Technology Conference; Vol. 2020-June).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Optical Platform for Highly Precise Optical Components. / Bengsch, Sebastian; Fischer, Eike; De Wall, Sascha et al.
Proceedings: IEEE 70th Electronic Components and Technology Conference, ECTC 2020. Institute of Electrical and Electronics Engineers Inc., 2020. p. 2191-2196 9159477 (Proceedings - Electronic Components and Technology Conference; Vol. 2020-June).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Passive and Active Thermal Management of Bonded Bare-Dice Laser Diodes on Polymer Foil Substrates. / Bengsch, Sebastian; Wurz, Marc Christopher.
2020 IEEE Photonics Conference, IPC 2020. Institute of Electrical and Electronics Engineers Inc., 2020. 9252383.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Prozessentwicklung zur Fertigung von substratlosen Mikrosystemen am Beispiel eines Mikro-Transformators. / Beringer, Sebastian.
Garbsen: TEWISS Verlag, 2020. 139 p.

Research output: ThesisDoctoral thesis

Selbstschärfende Mikroschleifwerkzeuge. / Asadi, Esmail; Hockauf, Rolf; Wurz, Marc Christopher.
Jahrbuch Schleifen, Honen, Läppen und Polieren. Essen: Vulkan-Verl, 2020.

Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearchpeer review

Thin Film Transferring via PVA Substrate and Contacting of Sensor inside Elastomer Matrix. / Bengsch, Sebastian; Giese, Ulrich; Fischer, Eike et al.
IEEE Sensors, SENSORS 2020: Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2020. 9278876 (Proceedings of IEEE Sensors; Vol. 2020-October).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Untersuchung der mikrofluidischen Galvanik zur Herstellung von magnetfeldsensitiven Schichten und deren Eigenschaften. / Rechel, Mathias.
Garbsen: TEWISS Verlag, 2020. 130 p.

Research output: ThesisDoctoral thesis


2019


Integrated atomic quantum technologies in demanding environments: development and qualification of miniaturized optical setups and integration technologies for UHV and space operation. / Christ, Marc; Kassner, Alexander; Smol, Robert et al.
In: CEAS Space Journal, Vol. 11, No. 4, 01.12.2019, p. 561-566.

Research output: Contribution to journalArticleResearchpeer review

Novel Eddy-Current Sensor for Industrial Deep-Drawing Applications. / Arndt, Matthias; Dencker, Folke; Wurz, Marc Christopher.
2019 IEEE Sensors, SENSORS 2019: Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8956948 (Proceedings of IEEE Sensors; Vol. 2019-October).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

„Hai-Tech“ spanend fertigen: Mikroschleifen – funktionalisierte Oberflächen – selbstschärfende Werkzeuge. / Wurz, Marc Christopher; Denkena, Berend; Asadi, Esmail et al.
In: WB Werkstatt und Betrieb, Vol. 2019, No. 6, 23.07.2019, p. 48-51.

Research output: Contribution to journalArticleResearch

Integrated Atomic Quantum Technologies in Demanding Environments: Development and Qualification of Miniaturized Optical Setups and Integration Technologies for UHV and Space Operation. / Christ, M.; Kassner, Alexander; Smol, R. et al.
International Conference on Space Optics, ICSO 2018: Proceedings. ed. / Zoran Sodnik; Nikos Karafolas; Bruno Cugny. SPIE, 2019. 1118088 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11180).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review