Publications at the Institute of Micro Production Technology

Showing results 101 - 200 out of 275

2019


Introduction to cellular signal transduction: The connection between a biological system and its surroundings. / Boyd, Jonathan W.; Neubig, Richard R.; Han, Alice et al.
Cellular Signal Transduction in Toxicology and Pharmacology: Data Collection, Analysis, and Interpretation. ed. / Jonathan W. Boyd; Richard R. Neubig. Wiley-Blackwell, 2019. p. 1-19.

Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearchpeer review

AMR-based mechanical pressure sensors: a proof of concept. / Prediger, Maren S.; Rechel, Mathias; Wurz, Marc Christopher.
2019. Paper presented at 15th International Symposium Magnetoresistive Sensors and Magnetic Systems, Germany.

Research output: Contribution to conferencePaperResearch

AMR Sensoren auf flexiblem substrat zur Messung von Verformungen eines hartmagnetischen Partikel-Elastomerverbunds. / Prediger, Maren S.; Wittek, Christian Gabriel R.; Owiss, Ghadeer et al.
MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. 1. ed. VDE Verlag GmbH, 2019. p. 111-114.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Atomchips mit integrierten optischen Gittern zur Erzeugung von Bose-Einstein-Kondensaten. / Kassner, Alexander; Dencker, Folke; Künzler, Christoph et al.
MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, 2019. p. 541-544.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Atom chip technology for use under UHV conditions. / Kassner, Alexander; Rechel, Mathias; Heine, Hendrik et al.
Smart Systems Integration 2019: International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2019. ed. / T. Otto. VDE Verlag GmbH, 2019. p. 69-75.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Elektrische Kontaktierung bauteilinhärenter Dehnungsmesssensorik mithilfe des Transient Liquid Phase (TLP) Bonding. / Ottermann, Rico; Knöpke, Rolf; Wurz, Marc Christopher.
MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, 2019. p. 263-266.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Fertigung und Charakterisierung von in Leiterplatten integrierten Mikrotransformatoren. / Fischer, Eike; Cromwell, Kevin; Wurz, Marc.
MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, 2019. p. 569-572.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

MEMS basierte magnetische passive Mikrobauteile für Hochfrequenz-Leistungsanwendungen. / Dinulovic, Dragan; Shousha, Mahmoud; El Shafey, K. et al.
MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, 2019. p. 32-35.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Microfabricated Magnetics on Silicon for Point of Load High-Frequency DC-DC Converter Applications. / Dinulovic, Dragan; Shousha, Mahmoud; Haug, Martin et al.
In: IEEE Transactions on Industry Applications, Vol. 55, No. 5, 8732443, 2019, p. 5068-5077.

Research output: Contribution to journalArticleResearchpeer review

Simulationsgestützte Auslegung und Fertigung von werkzeugintegrierten induktiven Sensoren. / Arndt, Matthias; Dencker, Folke; Wurz, Marc Christopher.
MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, 2019. p. 673-676.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Strukturbildung ultradünner Vanadiumoxid-Schichten bei der katalytischen Oxidation von Methanol an Rh(111). / Hesse, Martin.
Hannover: Leibniz Universität Hannover, 2019. 93 p.

Research output: ThesisDoctoral thesis

The concept of a large working stroke reluctance zipper actuator. / Glukhovskoy, Anatoly; Wurz, Marc Christopher.
MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, 2019. p. 506-509.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Vibro-tactile displays for stimulating surface impressions. / Schmelt, Andreas Seabstian; Fischer, Eike Christian; Hofmann, Viktor et al.
Proceedings of the 23rd International Congress on Acoustics: Integrating 4th EAA Euroregio 2019. ed. / Martin Ochmann; Michael Vorländer; Janina Fels. International Commission for Acoustics (ICA), 2019. p. 1000-1007 (Proceedings of the International Congress on Acoustics; Vol. 2019-September).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review


2018


Revealing of ultrasonic wire bonding mechanisms via metal-glass bonding. / Long, Yangyang; Dencker, Folke; Isaak, Andreas et al.
In: Materials Science and Engineering B: Solid-State Materials for Advanced Technology, Vol. 236-237, 29.11.2018, p. 189-196.

Research output: Contribution to journalArticleResearchpeer review

In vitro and in vivo accumulation of magnetic nanoporous silica nanoparticles on implant materials with different magnetic properties. / Janßen, Hilke Catherina; Warwas, Dawid Peter; Dahlhaus, David et al.
In: Journal of nanobiotechnology, Vol. 16, 96, 27.11.2018.

Research output: Contribution to journalArticleResearchpeer review

Elektrische Schaltungsstruktur und Verfahren zu deren Herstellung. / Maier, Hans Jürgen (Inventor); Wurz, Marc (Inventor); Beringer, Sebastian (Inventor).
Patent No.: DE102017108437. Oct 25, 2018.

Research output: Patent

Verfahren und Anlage zur Herstellung eines elektrischen Bauteils sowie Computerprogramm. / Klaas, Daniel (Inventor); Wurz, Marc Christopher (Inventor); Maier, Hans Jürgen (Inventor).
Patent No.: DE102017113212. Oct 11, 2018.

Research output: Patent

Design and characterization of the lateral actuator of a bimodal tactile display with two excitation directions. / Schmelt, Andreas S.; Hofmann, Viktor; Fischer, Eike C. et al.
In: Displays, Vol. 54, 09.2018, p. 34-46.

Research output: Contribution to journalArticleResearchpeer review

Concept for Using MID Technology for Advanced Packaging. / Wurz, Marc Christopher; Roesener, Bernd; Bengsch, Sebastian et al.
Proceedings: IEEE 68th Electronic Components and Technology Conference, ECTC 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 932-939 8429656 (Proceedings - Electronic Components and Technology Conference; Vol. 2018-May).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Structuring methods of polymers for low cost sensor manufacturing. / Bengsch, Sebastian; Wurz, Marc Christopher; Aue, Maximilian et al.
Proceedings: IEEE 68th Electronic Components and Technology Conference, ECTC 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 1396-1401 8429726 (Proceedings - Electronic Components and Technology Conference; Vol. 2018-May).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Self-cleaning mechanisms in ultrasonic bonding of Al wire. / Long, Yangyang; Dencker, Folke; Isaak, Andreas et al.
In: Journal of Materials Processing Technology, Vol. 258, 08.2018, p. 58-66.

Research output: Contribution to journalArticleResearchpeer review

Verfahren zur Anbringung einer elektrischen Mikrostruktur sowie Elastomerstruktur, Faserverbundbauteil und Reifen. / Maier, Hans Jürgen (Inventor); Wurz, Marc (Inventor); Bengsch, Sebastian (Inventor).
Patent No.: DE102016123795. Jun 14, 2018.

Research output: Patent

The mechanism of charge carrier generation at the TiO2—n-Si heterojunction activated by gold nanoparticles. / Mishin, Maxim V.; Vorobyev, Alexander A.; Kondrateva, Anastasia S. et al.
In: Semiconductor Science and Technology, Vol. 33, No. 7, 075014, 11.06.2018.

Research output: Contribution to journalArticleResearchpeer review

Flexible mono- and multilayer micro grinding tools for ultra-high precision processing and micro machining. / Asadi, Esmail; Hockauf, Rolf; Denkena, Berend et al.
European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. ed. / O. Riemer; Enrico Savio; D. Billington; R. K. Leach; D. Phillips. euspen, 2018. p. 151-152 (European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Verfahren zum Verbinden eines Halbleiterbauelements mit einem Gegenstück sowie Anordnung mit einem Halbleiterbauelement. / Wurz, Marc Christopher (Inventor); Overmeyer, Ludger (Inventor); Witzendorff, Philipp von (Inventor) et al.
Patent No.: DE102016123180. May 30, 2018.

Research output: Patent

Magnetic Properties of Thermal Sprayed Tungsten Carbide–Cobalt Coatings. / Angrisani, Gian Luigi; Taptimthong, Piriya; Thürer, Susanne Elisabeth et al.
In: Advanced engineering materials, Vol. 20, No. 9, 1800102, 11.05.2018.

Research output: Contribution to journalArticleResearchpeer review

Manufacturing and characterization of asymmetric evanescent field polished couplers for grating assisted mode selective fiber coupling. / Schlangen, Sebastian; Bremer, Kort; Zheng, Yulong et al.
Micro-Structured and Specialty Optical Fibres V. SPIE, 2018. 1068116 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10681).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Fabrication and characterization of high-speed PZT sensors for the investigation of ultrasonic wire bonding process. / Isaak, Andreas; Long, Yangyang; Asadi, Esmail et al.
Proceedings of the 18 international conference of the european society for precision engineering and nanotechnology. ed. / O. Riemer; Enrico Savio; D. Billington; R. K. Leach; D. Phillips. euspen, 2018. p. 163-164.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

A laser-based, in-line chlorine dioxide concentration sensor. / Wurz, Marc Christopher; Fischer, Eike Christian; Holz, Stephanie et al.
2018. Paper presented at AST - Symposium on Automated Systems and Technologies 2018.

Research output: Contribution to conferencePaperResearch

Electrically conductive adhesives for photovoltaic modules. / Geipel, Torsten.
Stuttgart: Fraunhofer-Verlag, 2018. 268 p. (Solar Energy and Systems Research).

Research output: Book/ReportMonographResearchpeer review

Electrically conductive adhesives for photovoltaic modules. / Geipel, Torsten.
2018. 268 p.

Research output: ThesisDoctoral thesis

Grinding of riblets with "beaver tooth" multi-layer tools. / Hockauf, Rolf; Asadi, Esmail; Denkena, Berend et al.
In: Procedia CIRP, Vol. 71, 2018, p. 155-159.

Research output: Contribution to journalConference articleResearchpeer review

Mode-selective polished fiber couplers based on fiber gratings. / Schlangen, Sebastian; Bremer, Kort; Isaak, Andreas et al.
Optical Fiber Communication Conference, OFC 2018. OSA - The Optical Society, 2018. (Optics InfoBase Conference Papers; Vol. Part F84-OFC 2018).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Next Generation Atom Chip Development. / Wurz, Marc Christopher; Papakonstantinou, Alexandros; Heine, Hendrik et al.
2018. Paper presented at DPG-Frühjahrstagungen 2018, Germany.

Research output: Contribution to conferencePaperResearch

Solid state joint actuator for a vibro tactile line display. / Schmelt, Andreas; Fischer, Eike Christian; Wurz, Marc et al.
ACTUATOR 2018: 16th International Conference and Exhibition on New Actuators and Drive Systems, Conference Proceedings. VDE Verlag GmbH, 2018. p. 284-287 (ACTUATOR 2018 - 16th International Conference and Exhibition on New Actuators and Drive Systems, Conference Proceedings).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review


2017


Analysis of the Wire/Substrate Interface during Ultrasonic Bonding Process. / Long, Yangyang; Dencker, Folke; Isaak, Andreas et al.
2017 IEEE CPMT Symposium Japan (ICSJ). Institute of Electrical and Electronics Engineers Inc., 2017. p. 203-206.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Klimt artwork: red-pigment material investigation by backscattering Fe-57 Mössbauer spectroscopy, SEM and p-XRF. / Lehmann, Robert; Wengerowsky, Dagmar; Schmidt, Heike J. et al.
In: Science and Technology of Archaeological Research, Vol. 3, No. 2, 15.12.2017, p. 450-455.

Research output: Contribution to journalArticleResearchpeer review

Bistable arch-like beams with modulated profile as perspective supporting structures of a microelectromenchanical actuator. / Enns, Y. B.; Pyatishev, E. N.; Glukhovskoy, A.
In: Journal of Physics: Conference Series, Vol. 917, No. 8, 082013, 23.11.2017.

Research output: Contribution to journalConference articleResearchpeer review

Fabrication and characterization of a Ni-Fe-W core microtransformer for high-Frequency power applications. / Mundotiya, Brij Mohan; Dinulovic, Dragan; Rissing, Lutz et al.
In: Sensors and Actuators, A: Physical, Vol. 267, 01.11.2017, p. 42-47.

Research output: Contribution to journalArticleResearchpeer review

A silicone fiber coating as approach for the reduction of fibroblast growth on implant electrodes. / Dencker, Folke; Dreyer, Lutz; Müller, Dietrich et al.
In: Journal of Biomedical Materials Research - Part B Applied Biomaterials, Vol. 105, No. 8, 11.2017, p. 2574-2580.

Research output: Contribution to journalArticleResearchpeer review

Comparative Study of Microfabricated Inductors/Transformers for High-Frequency Power Applications. / Dinulovic, Dragan; Shousha, Mahmoud; Haug, Martin et al.
In: IEEE transactions on magnetics, Vol. 53, No. 11, 8000366, 11.2017.

Research output: Contribution to journalArticleResearchpeer review

Feasibility of Round Window Stimulation by a Novel Electromagnetic Microactuator. / Van Drunen, Wouter Johannes; Mueller, Mathias; Glukhovskoy, Anatoly et al.
In: BioMed Research International, Vol. 2017, 6369247, 29.10.2017.

Research output: Contribution to journalArticleResearchpeer review

Kohlenstofffaser mit hoher Leitfähigkeit und Herstellungsverfahren hierfür. / Renz, Franz (Inventor); Sindelar, Ralf (Inventor); Tegenkamp, Christoph (Inventor) et al.
Patent No.: WO2017158140. Sept 21, 2017.

Research output: Patent

Nanosecond miniature transmitters for pulsed optical radars. / Filimonov, Alexey V.; Zemlyakov, Valery E.; Egorkin, Vladimir I. et al.
Internet of Things, Smart Spaces, and Next Generation Networks and Systems - 17th International Conference, NEW2AN 2017, 10th Conference, ruSMART 2017, 3rd Workshop NsCC 2017, Proceedings. Springer Verlag, 2017. p. 490-497 (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 10531 LNCS).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Investigation of intracochlear dual actuator stimulation in a scaled test rig. / Van Drunen, Wouter J.; Lachheb, Sarra Kacha; Glukhovskoy, Anatoly et al.
In: Current Directions in Biomedical Engineering, Vol. 3, No. 2, 09.2017, p. 119-122.

Research output: Contribution to journalArticleResearchpeer review

Temporal Impact of Toxic Exposures on Cellular Recovery. / Prediger, Maren S.; Mouch, Julia; Han, Alice et al.
In: ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 20.08.2017.

Research output: Contribution to journalArticleResearch

A micromechanical gyroscope with bistable suspension of microdrive. / Pyatishev, E.; Enns, Y.; Komarevtsev, I. et al.
2017 24th Saint Petersburg International Conference on Integrated Navigation Systems, ICINS 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. 7995646.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Visualization of oxide removal during ultrasonic wire bonding process. / Long, Yangyang; Dencker, Folke; Isaak, Andreas et al.
2017 IEEE 19th Electronics Packaging Technology Conference, EPTC 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1-4.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Sensors, data storage and communication technologies: Optoelectronic integration of radiofrequency communication systems in metalcomponents. / Breidenstein, Bernd; Mörke, Tobias; Hockauf, Rolf et al.
Cyber-Physical and Gentelligent Systems in Manufacturing and Life Cycle: Genetics and Intelligence - Keys to Industry 4.0. 1. ed. Elsevier Inc., 2017. p. 7-278.

Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearchpeer review

Mass production for micro end mills. / Denkena, Berend; Wurz, Marc; Grove, Thilo et al.
Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. ed. / D. Phillips; D. Billington. euspen, 2017. p. 245-246 (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Chip bonding of low-melting eutectic alloys by transmitted laser radiation. / Hoff, Christian; Venkatesh, Arjun; Schneider, Friedrich et al.
In: Advanced Optical Technologies, Vol. 6, No. 3-4, 12.04.2017, p. 311-317.

Research output: Contribution to journalArticleResearchpeer review

In vitro cytotoxicity assessment of a West Virginia chemical spill mixture involving 4-methylcyclohexanemethanol and propylene glycol phenyl ether. / Han, Alice A.; Fabyanic, Emily B.; Miller, Julie V. et al.
In: Environmental Monitoring and Assessment, Vol. 189, No. 4, 190, 04.2017.

Research output: Contribution to journalArticleResearchpeer review

Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding process. / Long, Yangyang; Dencker, Folke; Schneider, Friedrich et al.
Proceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016. Institute of Electrical and Electronics Engineers Inc., 2017. p. 405-410 7861512.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

New coating system for direct-deposition of sensors on components of arbitrary size: A novel approach allowing for thinner sensors with higher measuring accuracy. / Klaas, Daniel; Becker, Jürgen; Wurz, Marc Christopher et al.
IEEE Sensors, SENSORS 2016: Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. 7808440 (Proceedings of IEEE Sensors).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Anodische auflösung von aluminium als downsizing technik für mikro-induktivitäten. / Beringer, Sebastian; Dinulovic, Dragan; Bengsch, Sebastian et al.
MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2017. p. 624-627 (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Atom-Chip based BEC sources for compact and transportable experiments. / Wurz, Marc Christopher; Heine, Hendrik; Matthias, Jonas et al.
2017. Poster session presented at dpg-Frühjahrstagung Mainz, Mainz, Germany.

Research output: Contribution to conferencePosterResearch

Comparative study of microfabricated inductors / transformers for high frequency power applications. / Dinulovic, D.; Shousha, M.; Haug, M. et al.
2017 IEEE International Magnetics Conference, INTERMAG 2017. Institute of Electrical and Electronics Engineers Inc., 2017. 8007782.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Development of Nanocrystalline Soft Magnetic Ni-Fe-W Alloy Films and Implementation into a Microtransformer Application. / Mundotiya, Brij Mohan.
Garbsen: PZH Verlag, 2017. 132 p.

Research output: ThesisDoctoral thesis

Dicing by "Crack-and-Fracture": Novel separation method for MEMS substrates. / Stompe, Manuel; Wurz, Marc Christopher.
Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. euspen, 2017. p. 101-102 (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Electrical feed through for tool integrated high temperature applications. / Dencker, Folke; Kolodziejczyk, Felix; Wurz, Marc Christopher.
International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017. Mesago Messe Frankfurt GmbH, 2017. p. 50-56 (International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Elektromechanischer Mikro-Biegeaktor als optischer Shutte. / Wurz, Marc Christopher; Pyatishev, E.; Glukhovskoy, Anatoly et al.
Proceedings of the MikroSystemTechnik Kongress 2017. 2017.

Research output: Chapter in book/report/conference proceedingConference contributionResearch

Elektromechanischer Mikro-Biegeaktor als optischer Shutter. / Pyatishev, E.; Wurz, Marc; Enns, Y. et al.
MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2017. p. 519-522 (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Exploring Concentration and Duration Dependence in Hormesis. / Prediger, Maren S.
2017.

Research output: ThesisMaster's thesis

Flexibles magnetisches Lese-/Schreibsystem: Einfluss von Wärme auf das Datenbit. / Taptimthong, P.; Wurz, M. C.
MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2017. p. 586-589 (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Hot stamping process reliability – Innovative sensor technology for inline quality assurance. / Wurz, Marc Christopher; Behrens, Bernd-Arno; Hübner, Sven et al.
Conference Strategies in Car Body Engineering. 2017.

Research output: Chapter in book/report/conference proceedingConference contributionResearch

LED packaging with optimized heat dissipation for a micro LED array. / Kusch, Alexander; Wurz, Marc; Held, Marcel P. et al.
International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017. ed. / Thomas Otto. Mesago Messe Frankfurt GmbH, 2017. p. 399-402 (International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Mikroaktorik für ein Taktiles Display. / Fischer, Eike; Glukhovskoy, Anatoly; Schmelt, Andreas et al.
MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2017. p. 515-518 (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Mikrofluidische Galvanik zur Herstellung magnetoresistiver Schichten. / Rechel, Mathias; Taptimthong, Piriya; Arndt, Matthias et al.
MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2017. p. 313-316 (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Modeling and Characterization of a Bimodal Tactile Display. / Wurz, Marc Christopher; Fischer, Eike Christian; Twiefel, Jens et al.
2017. Paper presented at International Workshop on Piezoelectric Materials and Applications in Actuators, IWPMA 2017.

Research output: Contribution to conferencePaperResearch

Präzisionsbearbeitung bearbeitbarer Festkeramiken im ungebrannten Zustand durch Trennschleifen. / Stompe, Manuel.
Garbsen: PZH Verlag, 2017.

Research output: ThesisDoctoral thesis

Press hardening tool integrated thin film temperature sensor. / Dencker, Folke; Schlenkrich, A.; Wurz, Marc Christopher.
Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. euspen, 2017. p. 349-350 (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Pulsed electron source for atmospheric pressure chemical ionization in ion mobility spectrometry. / Bunert, Erik; Heptner, Andre; Kirk, Ansgar T. et al.
2017 30th International Vacuum Nanoelectronics Conference (IVNC). ed. / Christoph Langer; Robert Lawrowski. Institute of Electrical and Electronics Engineers Inc., 2017. p. 102-103 8051563 (International Vacuum Nanoelectronics Conference).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Reaktives Ionentiefenätzen von Schattenmasken für die Sensordirektabscheidung mit einer neuartigen Beschichtungsanlage. / Klaas, Daniel; Pehrs, Florian; Wurz, Marc Christopher.
MikroSystemTechnik Kongress 2017: Proceedings. Berlin: VDE Verlag GmbH, 2017. p. 680-683.

Research output: Chapter in book/report/conference proceedingConference contributionResearch

Silicon field emitter arrays produced via wafer dicing. / Kusch, Alexander; Wurz, Marc; Bunert, Erik et al.
2017 30th International Vacuum Nanoelectronics Conference (IVNC). ed. / Christoph Langer; Robert Lawrowski. Institute of Electrical and Electronics Engineers Inc., 2017. p. 132-133 8051577 (International Vacuum Nanoelectronics Conference).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Technical inheritance: Information basis for the identification and development of product generations. / Mozgova, Iryna; Barton, Sebastian; Demminger, Christian et al.
In: Proceedings of the International Conference on Engineering Design, ICED, Vol. 6, No. DS87-6, 2017, p. 91-100.

Research output: Contribution to journalConference articleResearchpeer review


2016


Comparison of ALD and IBS Al2O3 films for high power lasers. / Liu, Hao; Jensen, Lars; Becker, Jürgen et al.
48th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials 2016. SPIE, 2016. 1001421 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10014).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Longitudinal conductivity of LaF3/SrF2 multilayer heterostructures. / Vergentev, Tikhon; Banshchikov, Alexander; Filimonov, Alexey et al.
In: Science and Technology of Advanced Materials, Vol. 17, No. 1, 25.11.2016, p. 799-806.

Research output: Contribution to journalArticleResearchpeer review

Packaging for systems in harsh environments. / Wurz, Marc Christopher; Bengsch, Sebastian.
Semiconductor Devices in Harsh Conditions. CRC Press, 2016. p. 135-147.

Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearchpeer review

Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers. / Klaas, Daniel; Rein, M.; Wurz, Marc et al.
In: Procedia Technology, Vol. 26, 01.10.2016, p. 27-34.

Research output: Contribution to journalConference articleResearch

Flexible Magnetic Reading/Writing System: Heat-assisted Magnetic Recording. / Taptimthong, Piriya; Düsing, Jan Friedrich; Rissing, Lutz et al.
In: Procedia Technology, Vol. 26, 01.10.2016, p. 72-78.

Research output: Contribution to journalConference articleResearch

Stress Reduction in Sputtered Thin NiFe 81/19 Layers for Magnetic Field Sensors. / Jogschies, Lisa; Rittinger, Johannes; Klaas, Daniel et al.
In: Procedia Technology, Vol. 26, 01.10.2016, p. 162-168.

Research output: Contribution to journalConference articleResearch

Intracochlear Stimulation of the Basilar Membrane. / van Drunen, Wouter J; Hofmann, Viktor; Twiefel, Jens et al.
In: Biomedizinische Technik, Vol. 61, No. s1, 28.09.2016, p. 179-199.

Research output: Contribution to journalArticleResearchpeer review

Direct hot embossing of microelements by means of photostructurable polyimide. / Akin, Meriem; Rezem, Maher; Rahlves, Maik et al.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS, Vol. 15, No. 3, 034506, 23.08.2016.

Research output: Contribution to journalArticleResearchpeer review

Effect of Substrate Temperature on Magnetic Properties of Electroplated 82Ni-15Fe-3W Alloy Films. / Mundotiya, Brij Mohan; Rissing, Lutz; Wurz, Marc Christopher.
In: IEEE Transactions on Magnetics, Vol. 52, No. 8, 7448397, 08.2016.

Research output: Contribution to journalArticleResearchpeer review

Magnetic microstructure analysis of sputter deposited permalloy thin films on a spin-on polyimide substrate. / Rittinger, Johannes; Taptimthong, Piriya; Jogschies, Lisa et al.
In: Microsystem Technologies, Vol. 22, No. 7, 07.2016, p. 1627-1632.

Research output: Contribution to journalArticleResearchpeer review

Manufacturing of micro end mills by batch processing of silicon carbide. / Denkena, Berend; Wurz, Marc; Grove, Thilo et al.
Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016. ed. / P. Bointon; Richard Leach; N. Southon. euspen, 2016. (Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Normal force actuator for a tactile display using a micromechanically built spring element made of Polyimide. / Wurz, Marc; Rechel, Mathias; Twiefel, Jens et al.
ACTUATOR 2016. 2016.

Research output: Chapter in book/report/conference proceedingConference contributionResearch

An application report: Protective thin film layers for high temperature sensor technology. / Dencker, Folke; Wurz, Marc; Dubrovskiy, Sergey et al.
Proceedings of the 2016 IEEE North West Russia Section Young Researchers in Electrical and Electronic Engineering Conference, EIConRusNW 2016. ed. / S. Shaposhnikov. Institute of Electrical and Electronics Engineers Inc., 2016. p. 32-36 7448110.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Transmission laser bonding of low melting eutectic alloys. / Hoff, C.; Cromwell, K.; Hermsdorf, J. et al.
High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications V. ed. / Stefan Kaierle; Friedhelm Dorsch. SPIE, 2016. 97410K (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9741).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Spatiotemporal phosphoprotein distribution and associated cytokine response of a traumatic injury. / Han, Alice A.; Currie, Holly N.; Loos, Matthew S. et al.
In: CYTOKINE, Vol. 79, 03.2016, p. 12-22.

Research output: Contribution to journalArticleResearchpeer review

Concept development and evaluation of a hermetically sealed ceramic package. / Kusch, Alexander; Rissing, Lutz; Wurz, Marc Christopher.
2016. 413-416 Paper presented at Smart Systems Integration 2016 - 10th International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016, Munich, Germany.

Research output: Contribution to conferencePaperResearchpeer review

Development and optimization of thin-film technology based micro-inductors and transformers. / Beringer, Sebastian; Dinulovic, Dragan; Haug, Martin et al.
In: MAGNETIC MATERIALS PROCESSES AND DEVICES 14, Vol. 75, No. 2, 2016, p. 51-58.

Research output: Contribution to journalConference articleResearchpeer review

Effect of annealing temperature on the coercivity and the electrical resistivity of the electroplated ni-fe-w alloy film. / Mundotiya, Brij Mohan; Rissing, Lutz; Wurz, Marc Christopher.
In: ECS Transactions, Vol. 75, No. 2, 2016, p. 59-65.

Research output: Contribution to journalConference articleResearchpeer review

Electroplating through fluidic channels as production technology for 3d interconnect devices and sensing structures. / Rechel, Mathias; Bengsch, Sebastian; Wurz, Marc Christopher.
Processing Materials of 3D Interconnects, Damascene and Electronics Packaging 8. Vol. 75 7. ed. Electrochemical Society, Inc., 2016. p. 25-32 (PROCESSING MATERIALS OF 3D INTERCONNECTS, DAMASCENE AND ELECTRONICS PACKAGING 8).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Investigation for thinning-by-dicing of sintered and unsintered ceramics. / Stompe, Manuel; Asadi, Esmail; Rissing, Lutz et al.
2016. Paper presented at 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016, Nottingham, United Kingdom (UK).

Research output: Contribution to conferencePaperResearchpeer review

P8.1 - Characterization of a Read/Write Head. / Taptimthong, Piriya; Rissing, Lutz; Wurz, Marc Christopher.
2016. 769-775 Paper presented at 18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016.

Research output: Contribution to conferencePaperResearch

Präzisionsbearbeitung endkonturnaher Keramik im ungesinterten Zustand. / Wurz, Marc; Rissing, Lutz; Stompe, Manuel.
67. Ausgabe Jahrbuch Schleifen, Honen, Lippe und Polieren. Vulkan-Verlag Essen, 2016.

Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearch

Structuring methods of plastic substrates for electroplating applications. / Bengsch, Sebastian; Rechel, Mathias; Asadi, Esmail et al.
Magnetic Materials Processes and Devices 14. ed. / C. Bonhote; G. Zangari; Y. Kitamoto; T. Osaka; H. H. Gatzen. Vol. 75 2. ed. Electrochemical Society, Inc., 2016. p. 67-73 (MAGNETIC MATERIALS PROCESSES AND DEVICES 14).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Thin-film based microtransformer suitable for high switching frequency power applications. / Dinulovic, Dragan; Shousha, Mahmoud; Haug, Martin et al.
2016. 107-112 Paper presented at 2016 International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management, PCIM Europe 2016, Nuremberg, Germany.

Research output: Contribution to conferencePaperResearchpeer review

UltraMag: Integration ultradünner Magnetfeldsensoren in intelligenten Automatisierungskomponenten. / Gottfried Wilhelm Leibniz Universität Hannover.
1. Auflage ed. Stuttgart: Steinbeis-Edition, 2016.

Research output: Book/ReportMonographResearchpeer review