Showing results 201 - 300 out of 305
2016
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS, Vol. 15, No. 3, 034506, 23.08.2016.
Research output: Contribution to journal › Article › Research › peer review
In: IEEE Transactions on Magnetics, Vol. 52, No. 8, 7448397, 08.2016.
Research output: Contribution to journal › Article › Research › peer review
In: Microsystem Technologies, Vol. 22, No. 7, 07.2016, p. 1627-1632.
Research output: Contribution to journal › Article › Research › peer review
Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016. ed. / P. Bointon; Richard Leach; N. Southon. euspen, 2016. (Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
ACTUATOR 2016. 2016.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
Proceedings of the 2016 IEEE North West Russia Section Young Researchers in Electrical and Electronic Engineering Conference, EIConRusNW 2016. ed. / S. Shaposhnikov. Institute of Electrical and Electronics Engineers Inc., 2016. p. 32-36 7448110.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications V. ed. / Stefan Kaierle; Friedhelm Dorsch. SPIE, 2016. 97410K (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9741).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
In: CYTOKINE, Vol. 79, 03.2016, p. 12-22.
Research output: Contribution to journal › Article › Research › peer review
2016. 413-416 Paper presented at Smart Systems Integration 2016 - 10th International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016, Munich, Germany.
Research output: Contribution to conference › Paper › Research › peer review
In: MAGNETIC MATERIALS PROCESSES AND DEVICES 14, Vol. 75, No. 2, 2016, p. 51-58.
Research output: Contribution to journal › Conference article › Research › peer review
In: ECS Transactions, Vol. 75, No. 2, 2016, p. 59-65.
Research output: Contribution to journal › Conference article › Research › peer review
Processing Materials of 3D Interconnects, Damascene and Electronics Packaging 8. Vol. 75 7. ed. Electrochemical Society, Inc., 2016. p. 25-32 (PROCESSING MATERIALS OF 3D INTERCONNECTS, DAMASCENE AND ELECTRONICS PACKAGING 8).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
2016. Paper presented at 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016, Nottingham, United Kingdom (UK).
Research output: Contribution to conference › Paper › Research › peer review
2016. 769-775 Paper presented at 18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016.
Research output: Contribution to conference › Paper › Research
67. Ausgabe Jahrbuch Schleifen, Honen, Lippe und Polieren. Vulkan-Verlag Essen, 2016.
Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research
Magnetic Materials Processes and Devices 14. ed. / C. Bonhote; G. Zangari; Y. Kitamoto; T. Osaka; H. H. Gatzen. Vol. 75 2. ed. Electrochemical Society, Inc., 2016. p. 67-73 (MAGNETIC MATERIALS PROCESSES AND DEVICES 14).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
2016. 107-112 Paper presented at 2016 International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management, PCIM Europe 2016, Nuremberg, Germany.
Research output: Contribution to conference › Paper › Research › peer review
1. Auflage ed. Stuttgart: Steinbeis-Edition, 2016.
Research output: Book/Report › Monograph › Research › peer review
37 p. Hannover: Leibniz Universität Hannover, Institut für Mikroproduktionstechnik. 2016.
Research output: Other contribution › Other publication › Research › peer review
2015
In: Physics Procedia, Vol. 75, 29.12.2015, p. 1252-1258.
Research output: Contribution to journal › Conference article › Research › peer review
In: Sensors (Switzerland), Vol. 15, No. 11, 12.11.2015, p. 28665-28689.
Research output: Contribution to journal › Article › Research › peer review
Patent No.: DE102014004323. Oct 01, 2015.
Research output: Patent
Patent No.: DE102014102442. Aug 27, 2015.
Research output: Patent
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems. SPIE, 2015. 95171R (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9517).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
In: ECS Transactions, Vol. 64, No. 31, 30.04.2015, p. 75-83.
Research output: Contribution to journal › Article › Research
In: Energy Harvesting and Systems, Vol. 2, No. 3-4, 21.03.2015, p. 137-142.
Research output: Contribution to journal › Article › Research › peer review
Smart Photonic and Optoelectronic Integrated Circuits XVII. SPIE, 2015. 936609 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9366).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
Patent No.: DE102013013464. Feb 19, 2015.
Research output: Patent
2015. Paper presented at SMTA Pan Pacific Microelectronics Symposium, United States.
Research output: Contribution to conference › Paper › Research
Springer Berlin Heidelberg, 2015. 519 p.
Research output: Book/Report › Monograph › Research › peer review
MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 606-609 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 761-764 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 824-827 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 684-687 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 563-566 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
Diamond Business. Vol. 3 2015. p. 12-16.
Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research
2015. Paper presented at SMTA Pan Pacific Microelectronics Symposium, United States.
Research output: Contribution to conference › Paper › Research
2015.
Research output: Book/Report › Project report/research report › Research
Hannover: Leibniz Universität Hannover. 2015.
Research output: Other contribution › Other publication › Research › peer review
MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 338-341 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
2014
In: IEEE transactions on magnetics, Vol. 50, No. 11, 6971719, 11.2014.
Research output: Contribution to journal › Article › Research
In: Procedia Technology, Vol. 15, 01.10.2014, p. 230-237.
Research output: Contribution to journal › Article › Research › peer review
In: EPJ Web of Conferences, Vol. 75, 06006, 03.07.2014.
Research output: Contribution to journal › Conference article › Research › peer review
In: Journal of Applied Physics, Vol. 115, No. 17, 17A317, 07.05.2014.
Research output: Contribution to journal › Article › Research › peer review
In: Hyperfine Interactions, Vol. 226, No. 1-3, 04.2014, p. 237-241.
Research output: Contribution to journal › Article › Research › peer review
Patent No.: WO2014023320. Feb 13, 2014.
Research output: Patent
GMM, VDI/VDE-IT (eds) Tagungsband: MikroSystemTechnikKongress 2013, Von Bauelementen zu Systemen. 2014. p. 555-558.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
St. Petersburg State Polytechnical University Journal 5. 205. ed. 2014. p. 21-35.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
Magnetic Materials, Processes, and Devices 13. 31. ed. Electrochemical Society, Inc., 2014. p. 21-31 (ECS Transactions; Vol. 64, No. 31).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
2013
In: Journal of the European Optical Society, Vol. 8, 13065, 19.09.2013.
Research output: Contribution to journal › Article › Research › peer review
In: Precision Engineering, Vol. 38, No. 1, 05.09.2013, p. 162-167.
Research output: Contribution to journal › Article › Research › peer review
Active and Passive Smart Structures and Integrated Systems 2013. 2013. 86881L (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8688).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
In: Microelectronic Engineering, Vol. 110, 26.02.2013, p. 315-319.
Research output: Contribution to journal › Article › Research › peer review
In: EPJ Web of Conferences, Vol. 40, 16003, 14.01.2013.
Research output: Contribution to journal › Article › Research › peer review
In: Production Engineering, Vol. 7, No. 1, 01.2013, p. 3-8.
Research output: Contribution to journal › Article › Research › peer review
Magnetic Materials, Processes, and Devices 12. 10. ed. Electrochemical Society, Inc., 2013. p. 207-216 (ECS Transactions; Vol. 50, No. 10).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
Magnetic Materials, Processes, and Devices 12. 10. ed. Electrochemical Society, Inc., 2013. p. 189-197 (ECS Transactions; Vol. 50, No. 10).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
Magnetic Materials, Processes, and Devices 12. 10. ed. Electrochemical Society, Inc., 2013. p. 175-187 (ECS Transactions; Vol. 50, No. 10).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
Magnetic Materials, Processes, and Devices 12. 10. ed. Electrochemical Society, Inc., 2013. p. 147-156 (ECS Transactions; Vol. 50, No. 10).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
2013. 840-845 Paper presented at 32nd International Congress on Applications of Lasers and Electro-Optics, ICALEO 2013, Miami, FL, United States.
Research output: Contribution to conference › Paper › Research › peer review
Magnetic Materials, Processes, and Devices 12. 10. ed. Electrochemical Society, Inc., 2013. p. 119-131 (ECS Transactions; Vol. 50, No. 10).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
2013. 352 Paper presented at 58th Magnetism & Magnetic Materials (MMM2013), Chicago, United States.
Research output: Contribution to conference › Paper › Research
Hannover. 2013.
Research output: Other contribution › Other publication › Research › peer review
2012
Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II. 2012. 84890F (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8489).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
Patent No.: WO2012116933. Sept 07, 2012.
Research output: Patent
In: IEEE transactions on magnetics, Vol. 48, No. 4, 6172423, 04.2012, p. 1481-1484.
Research output: Contribution to journal › Article › Research › peer review
In: Microfluidics and Nanofluidics, Vol. 13, No. 2, 07.03.2012, p. 299-308.
Research output: Contribution to journal › Article › Research › peer review
In: IEEE transactions on magnetics, Vol. 48, No. 11, 6332572, 2012, p. 3843-3846.
Research output: Contribution to journal › Article › Research › peer review
Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. ed. / H. Spaan; Theresa Burke; Paul Shore. euspen, 2012. p. 279-282 (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012; Vol. 2).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
2011
IEEE International Conference on Industrial Engineering and Engineering Management, IEEM2011. 2011. p. 499-503 6117967 (IEEE International Conference on Industrial Engineering and Engineering Management).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
In: Production Engineering, Vol. 5, No. 3, 05.12.2011, p. 233-240.
Research output: Contribution to journal › Article › Research › peer review
In: Metall, Vol. 65, No. 11, 11.2011, p. 504-506.
Research output: Contribution to journal › Article › Research › peer review
In: IEEE transactions on magnetics, Vol. 47, No. 10, 6027638, 10.2011, p. 3760-3763.
Research output: Contribution to journal › Article › Research › peer review
Nano and Micro Materials, Devices and Systems; Microsystems Integration. American Society of Mechanical Engineers(ASME), 2011. p. 447-454 (ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011; Vol. 11).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
In: Progress in Electromagnetics Research Symposium, 2011, p. 752-755.
Research output: Contribution to journal › Conference article › Research › peer review
Kolloquium Mikroproduktion und Abschlusskolloquium SFB 499; 11. - 12. Oktober 2011. ed. / O. Kraft; A. Haug; F. Vollertsen; S. Büttgenbach. Karlsruhe: KIT Scientific Publishing, 2011. p. 113-118 (KIT scientific reports; Vol. 7591).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
In: Tribologie und Schmierungstechnik, 2011.
Research output: Contribution to journal › Article › Research › peer review
Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011. 2011.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
Proceedings: Mikrosystemtechnik-Kongress 2011 : 10.-12. Oktober 2011, Darmstadt. Berlin: VDE Verlag GmbH, 2011. p. 273-276 67.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011. 2011.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011. ed. / P. Shore; Henny Spaan; H. Van Brussel; Theresa Burke. euspen, 2011. p. 168-171 (Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011; Vol. 2).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
2010
In: Microsystem technologies, Vol. 16, No. 8-9, 08.2010, p. 1445-1450.
Research output: Contribution to journal › Article › Research › peer review
In: IEEE transactions on magnetics, Vol. 46, No. 6, 5467400, 06.2010, p. 2256-2259.
Research output: Contribution to journal › Article › Research › peer review
Magnetic Materials Processes and Devices 11. 34. ed. Electrochemical Society, Inc., 2010. p. 33-42 (ECS Transactions; Vol. 33, No. 34).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
Garbsen: PZH, Produktionstechn. Zentrum, 2010.
Research output: Thesis › Doctoral thesis
29th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2010 - Congress Proceedings. 2010.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
Magnetic Materials Processes and Devices 11. 34. ed. Electrochemical Society, Inc., 2010. p. 93-104 (ECS Transactions; Vol. 33, No. 34).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
2009
In: Computers and Fluids, Vol. 38, No. 4, 04.2009, p. 757-764.
Research output: Contribution to journal › Article › Research › peer review
In: Microfluidics and nanofluidics, Vol. 6, No. 4, 04.2009, p. 489-498.
Research output: Contribution to journal › Article › Research › peer review
ECS Transactions - Magnetic Materials, Processes and Devices 10 - 214th ECS Meeting. 45. ed. 2009. p. 207-216 (ECS Transactions; Vol. 16, No. 45).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
2008
In: Physica Status Solidi (A) Applications and Materials Science, Vol. 205, No. 10, 10.2008, p. 2307-2312.
Research output: Contribution to journal › Article › Research › peer review
In: LANGMUIR, Vol. 24, No. 16, 01.08.2008, p. 8547-8553.
Research output: Contribution to journal › Article › Research › peer review
In: International Journal of Heat and Mass Transfer, Vol. 51, No. 13-14, 01.07.2008, p. 3696-3699.
Research output: Contribution to journal › Article › Research › peer review
In: Journal of computational physics, Vol. 227, No. 11, 10.05.2008, p. 5871-5895.
Research output: Contribution to journal › Article › Research › peer review
In: European Physical Journal: Special Topics, Vol. 158, No. 1, 05.2008, p. 243-247.
Research output: Contribution to journal › Article › Research › peer review
12th International Conference on Miniaturized Systems for Chemistry and Life Sciences : The Proceedings of MicroTAS 2008 Conference. Chemical and Biological Microsystems Society, 2008. p. 56-58.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
2007
Modeling of Process Intensification. Wiley-VCH Verlag GmbH & Co. KGaA, 2007. p. 25-78.
Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research › peer review
In: AIChE journal, Vol. 53, No. 4, 12.03.2007, p. 1006-1016.
Research output: Contribution to journal › Article › Research › peer review
Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences: uTAS 2007. ed. / Jean-Louis Viovy; Patrick Tabeling; Stephanie Descroix; Laurent Malaquin. Chemical and Biological Microsystems Society, 2007. p. 808-810.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
Microfluidic Technologies for Miniaturized Analysis Systems. Springer US, 2007. p. 1-58 (MEMS Reference Shelf (MEMSRS)).
Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research › peer review