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Our main research activities focus on the design and production-oriented fabrication of micro-electromechanical systems (MEMS) for applications in quantum technology, industry-related sensor technology and biomedical engineering. The core competences of the institute are thin film technology, structuring technology, packaging technology, mechanical processing and characterization of MEMS and MEMS materials.

News

Our goal is to develop high-performance optics for mass production

The Cluster of Excellence PhoenixD cluster (Photonics Optics Engineering – Innovation Across Disciplines) receives 52 million euros in federal and state funding. How the approximately 110 researchers are using this money, explain the cluster's executive board members, Professor Dr Uwe Morgner and Professor Dr Ludger Overmeyer.

Find out more on the website of the current issue of Phi.