Fabrication of Drive and Guide Components for Micromotors
| Categories |
Zeitschriften/Aufsätze |
| Year | 2008 |
| Authors | M. Feldmann, A. Waldschick, C. Ruffert, H.H. Gatzen, S. Büttgenbach |
| Published in | Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 12, pp. 1941-1947 |
