An Electromagnetically Actuated Bi-stable MEMS Optical Microswitch
Categories |
Konferenz (reviewed) |
Year | 2003 |
Authors | H.H. Gatzen, E. Obermeier, T. Kohlmeier, T. Budde, H.D. Ngo, B. Mukhopadhyay, M. Farr |
Published in | Proc. Transducers 03, Boston, MA, USA, pp. 1514-1517 |