Thick Sputter Deposited NiFe 45/55 Films for Flux Guides In Magnetic MEMS
| Categories |
Konferenz (reviewed) |
| Year | 2003 |
| Authors | T. Budde, H.H. Gatzen |
| Published in | Proc. 16th Soft Magnetic Materials Conf. 2003, Düsseldorf, Germany, pp. 867-872 |
