Institute of Micro Production Technology Research Publications
Precision Profile Grinding of High Aspect Ratio Microstructures

Precision Profile Grinding of High Aspect Ratio Microstructures

Categories Konferenz (reviewed)
Year 2003
Authors H.H. Gatzen, C. Morsbach
Published in Proc. euspen Int. Top. Conf. 2003, Aachen, Germany, pp. 349-352