The Application of Chemical-Mechanical Polishing for Planarizing a SU-8/Permalloy Combination Used in MEMS Devices
| Categories |
Zeitschriften/Aufsätze |
| Year | 2003 |
| Authors | C. Kourouklis, T. Kohlmeier, H.H. Gatzen |
| Published in | Sensors & Actuators A: Physical, Vol. 106, No. 1-3, pp. 268-271 |
