Institute of Micro Production Technology Research Publications
Ni Electroplating in SU-8 Microforms for Fabricating Self Supporting Microstructures

Ni Electroplating in SU-8 Microforms for Fabricating Self Supporting Microstructures

Categories Konferenz (reviewed)
Year 2002
Authors T. Kohlmeier, H.H. Gatzen
Published in Proc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 137-148