Institute of Micro Production Technology Research Publications
Mechanical Micromachining of High Aspect Ratio Microstructures

Mechanical Micromachining of High Aspect Ratio Microstructures

Categories Konferenz (reviewed)
Year 2002
Authors H.H. Gatzen, C. Morsbach, A. Karyazin
Published in Proc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 562-566