Mechanical Micromachining of High Aspect Ratio Microstructures
Categories |
Konferenz (reviewed) |
Year | 2002 |
Authors | H.H. Gatzen, C. Morsbach, A. Karyazin |
Published in | Proc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 562-566 |