Institute of Micro Production Technology Research Publications
Magnetic Properties of Thick Sputter Deposited SmCo-Films for MEMS-Applications

Magnetic Properties of Thick Sputter Deposited SmCo-Films for MEMS-Applications

Categories Konferenz (reviewed)
Year 2002
Authors T. Budde, H.H. Gatzen
Published in Digest Intermag Europe 2002, Amsterdam, The Netherlands, GD05