Challenges in Using Photosensitive Embedding Material to Planarize Multi-layer Coils for Actuator Systems
| Categories |
Zeitschriften/Aufsätze |
| Year | 2002 |
| Authors | T. Kohlmeier, H.H. Gatzen |
| Published in | Journal of Magnetism and Magn. Mat., Vol. 242-245, pp. 1149-1152 |
