Institute of Micro Production Technology Research Publications
Roughness Standards for the Calibration of SPM- from Design to Comparison Measurement

Roughness Standards for the Calibration of SPM- from Design to Comparison Measurement

Categories Konferenz (reviewed)
Year 2001
Authors H.H. Gatzen, C. Kourouklis, R. Krüger-Sehm
Published in Proc. 5th Seminar on Quantitative Microscopy, Nanoscale 2001, Bergisch Gladbach, pp. 7-13