Roughness Standards for the Calibration of SPM- from Design to Comparison Measurement
Categories |
Konferenz (reviewed) |
Year | 2001 |
Authors | H.H. Gatzen, C. Kourouklis, R. Krüger-Sehm |
Published in | Proc. 5th Seminar on Quantitative Microscopy, Nanoscale 2001, Bergisch Gladbach, pp. 7-13 |