Institute of Micro Production Technology Research Publications
Kerf Sidewall Phenomena in Slicing Processes of Thin Film Heads

Kerf Sidewall Phenomena in Slicing Processes of Thin Film Heads

Categories Konferenz (reviewed)
Year 1999
Authors H.H. Gatzen, J. Zeadan, G. Jones
Published in Proc. euspen 1st Int. Conf. 1999, Bremen, pp. 548-461