Chemical-mechanical Planarization of a SU-8/Copper combination for MEMS
| Categories |
Zeitschriften/Aufsätze |
| Year | 2003 |
| Authors | H.H. Gatzen, C. Morsbach, C. Kourouklis |
| Published in | Proc. ASPE 18th Ann. Meet. 2003, Portland, Oregon, USA, Sensors & Actuators A: Physical, Vol. 106, No. 1-3, pp. 268-271 |
