Alternatives for Fabricating Aerostatic Micro Guides
| Categories |
Konferenz (reviewed) |
| Year | 2007 |
| Authors | C. Ruffert, H.H. Gatzen |
| Published in | Proc. Smart Systems Integration 2007, European Conference & Exhibition on integration issues of miniaturized systems – MEMS, MOEMS, ICs and electronic components, Paris, France, pp. 604-607 |
