Institute of Micro Production Technology Research Publications
Development and Evaluation of an Active Magnetic Guide for Microsystems with an Integrated Air Gap Measurement System

Development and Evaluation of an Active Magnetic Guide for Microsystems with an Integrated Air Gap Measurement System

Categories Zeitschriften/Aufsätze
Year 2007
Authors C. Ruffert, J. Li, B. Denkena, H.H. Gatzen
Published in IEEE Trans. on Magn., Vol. 43, No. 6, pp. 2716-2718