Design Improvements for a Linear Hybrid Step Micro-actuator
| Categories |
Zeitschriften/Aufsätze |
| Year | 2006 |
| Authors | M. Hahn, R. Gehrking, B. Ponick, H.H. Gatzen |
| Published in | Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 646-649 |
