Design Improvements for a Linear Hybrid Step Micro-actuator
Categories |
Zeitschriften/Aufsätze |
Year | 2006 |
Authors | M. Hahn, R. Gehrking, B. Ponick, H.H. Gatzen |
Published in | Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 646-649 |