Fabrication of Functional Components forEelectromagnetic Microactuators
| Categories |
Zeitschriften/Aufsätze |
| Year | 2006 |
| Authors | C. Ruffert, M. Feldmann, S. Büttgenbach, H.H. Gatzen |
| Published in | Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 670-675 |
