Maskless Nonlinear Lithography with Femtosecond Laser Pulses
| Categories |
Beiträge in Büchern |
| Year | 2006 |
| Authors | J. Koch, E. Fadeeva, M. Engelbrecht, C. Ruffert, H.H. Gatzen, A. Ostendorf, B.N. Chichkov |
| Published in | Applied Physics A: Materials Science & Processing, Springer-Verlag GmbH, A 82, pp. 23-26, ISSN: 0947-8396 |
