Institute of Micro Production Technology Research Publications
Electroplated CoFe Thin Films for Electromagnetic Microactuators

Electroplated CoFe Thin Films for Electromagnetic Microactuators

Categories Zeitschriften/Aufsätze
Year 2006
Authors M. Bedenbecker, H.H. Gatzen
Published in MMM 2005, San Jose, CA, USA, Journal of Applied Physics, Vol. 99, 08M308