Institute of Micro Production Technology Research Publications
Microfabricated Inductive Micropositioning Sensor for Measurement of a Linear Movement

Microfabricated Inductive Micropositioning Sensor for Measurement of a Linear Movement

Categories Zeitschriften/Aufsätze
Year 2006
Authors D. Dinulovic, H.H. Gatzen
Published in IEEE Sensors Journal, Vol. 6, No. 6, pp. 1482-1487