Institute of Micro Production Technology Research Publications
Microfabricated Inductive Sensor for Position Measurements

Microfabricated Inductive Sensor for Position Measurements

Categories Konferenz (reviewed)
Year 2004
Authors D. Dinulovic, H.H. Gatzen
Published in Proc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 471-480