Microfabricated Inductive Sensor for Position Measurements
Categories |
Konferenz (reviewed) |
Year | 2004 |
Authors | D. Dinulovic, H.H. Gatzen |
Published in | Proc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 471-480 |