Institute of Micro Production Technology Research Publications
Design, Fabrication, and Characterization of a Hybrid Linear Micro Step Motor

Design, Fabrication, and Characterization of a Hybrid Linear Micro Step Motor

Categories Konferenz (reviewed)
Year 2004
Authors T. Budde, M. Hahn, M. Föhse, J. Edler, H.-D. Stölting, H.H. Gatzen
Published in Proc. 9th Int. Conf. on New Actuators 2004, Bremen, Germany, pp. 665-668