Submicron coatings for micro-tribological applications
| Categories |
Zeitschriften/Aufsätze |
| Year | 2004 |
| Authors | R. Bandorf, H. Lüthje, K. Schiffmann, M. Beck, H.H. Gatzen, M. Schmidt, S. Büttgenbach, G. Bräuer |
| Published in | Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 10, No. 3, pp. 223-226 |
