An Investigation on Technologies to Fabricate Microcoils for Miniaturized Actuator Systems
Categories |
Beiträge in Büchern |
Year | 2004 |
Authors | T. Kohlmeier, V. Seidemann, S. Büttgenbach, H.H. Gatzen |
Published in | Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol.10, No. 3, pp.175-185 |