An Investigation on Technologies to Fabricate Magnetic Microcomponents for Miniaturized Actuator Systems
Categories |
Zeitschriften/Aufsätze |
Year | 2004 |
Authors | T. Budde, M. Föhse, B. Majjer, H. Lüthje, G. Bräuer, H.H. Gatzen |
Published in | Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol.10, No. 3, pp. 237-240 |