Institute of Micro Production Technology Research Publications
An Investigation on Technologies to Fabricate Magnetic Microcomponents for Miniaturized Actuator Systems

An Investigation on Technologies to Fabricate Magnetic Microcomponents for Miniaturized Actuator Systems

Categories Zeitschriften/Aufsätze
Year 2004
Authors T. Budde, M. Föhse, B. Majjer, H. Lüthje, G. Bräuer, H.H. Gatzen
Published in Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol.10, No. 3, pp. 237-240