High Aspect Ratio Spiral and Meander Micro Coils for Actuator Applications
| Categories |
Zeitschriften/Aufsätze |
| Year | 2004 |
| Authors | S. Seidemann, T. Kohlmeier, M. Föhse, H.H. Gatzen, S. Büttgenbach |
| Published in | HARMST 2003, Monterey, CA, USA, Microsystem Technologies Vol. 10, No. 6-7, pp. 564-567 |
