Non-reactive and reactive ion etching processes for patterning magnetic MEMS components
| Categories |
Konferenz (reviewed) |
| Year | 2003 |
| Authors | M. Balke, H. Lüthje, T. Budde, H.H. Gatzen, G. Bräuer |
| Published in | Proc. of the 2nd MICRO.tec Conf. 2003, Munich, pp. 51-52 |
