Institute of Micro Production Technology Research Publications
Concept for a Wafer Level Test System for Measuring Magnetic Film Properties

Concept for a Wafer Level Test System for Measuring Magnetic Film Properties

Categories Zeitschriften/Aufsätze
Year 2007
Authors H.H. Gatzen, D. Dinulovic, E. Flick, H. Gerdes, K. Feindt, M. Eccarius
Published in Symposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 165-177