Tribological Investigation of CMP for Electroplated NiFe Microstructures
| Categories |
Konferenz (reviewed) |
| Year | 2008 |
| Authors | D. Miletic, S. Cvetkovic, C.-T. Weber, H.H. Gatzen |
| Published in | Proc. euspen 8th, Int. Conf. 2008, Zurich, Switzerland, Vol. 1, pp. 138-142 |
