Institute of Micro Production Technology Research Publications
Fabrication and Characterization of Microactuators with Discrete MSM Bulk Material

Fabrication and Characterization of Microactuators with Discrete MSM Bulk Material

Categories Konferenz (reviewed)
Year 2008
Authors B. Spasova, M.C. Wurz, H.H. Gatzen
Published in Proc. 11th Int. Conf. on new Actuators 2008, Bremen, Germany, pp. 713-716