Fabrication and Characterization of Microactuators with Discrete MSM Bulk Material
Categories |
Konferenz (reviewed) |
Year | 2008 |
Authors | B. Spasova, M.C. Wurz, H.H. Gatzen |
Published in | Proc. 11th Int. Conf. on new Actuators 2008, Bremen, Germany, pp. 713-716 |