Dicing Process for the Device Separation of a Slider with an Integrated Microactuator (SLIM)
Categories |
Konferenz (reviewed) |
Year | 2008 |
Authors | S. Cvetkovic, H. Saalfeld, H.H. Gatzen |
Published in | Proc. ASPE 23rd Ann. Meet. 2008 and 12th ICPE, Portland, OR, USA, pp. 380-383 |