Institute of Micro Production Technology Research Publications
Optimization of the Adhesion of Diamond-like Carbon on Glass Substrates for Microelectro Mechanical Systems by Nanoindentational Studies

Optimization of the Adhesion of Diamond-like Carbon on Glass Substrates for Microelectro Mechanical Systems by Nanoindentational Studies

Categories Konferenz (reviewed)
Year 2008
Authors F. Pape, H.H. Gatzen
Published in Leeds-Lyon Symposium on Tribology 2008, Leeds, UK