Institute of Micro Production Technology Research Publications
Studies on Diamond-like Carbon Coatings for the Application in Micro Actuators

Studies on Diamond-like Carbon Coatings for the Application in Micro Actuators

Categories Zeitschriften/Aufsätze
Year 2008
Authors D. Paulkowski, R. Bandorf, S. Achilles, F. Pape, H.H. Gatzen, G. Bräuer
Published in EUROMAT 2007, Nuremberg, Germany, (accepted for Advanced Engineering Materials), Wiley-VCH Verla