Studies on Diamond-like Carbon Coatings for the Application in Micro Actuators
Categories |
Zeitschriften/Aufsätze |
Year | 2008 |
Authors | D. Paulkowski, R. Bandorf, S. Achilles, F. Pape, H.H. Gatzen, G. Bräuer |
Published in | EUROMAT 2007, Nuremberg, Germany, (accepted for Advanced Engineering Materials), Wiley-VCH Verla |