Magnetic Micro Electro-Mechanical Systems (MEMS) for Sensor and Actuator Applications
| Categories |
Konferenz (reviewed) |
| Year | 2008 |
| Authors | H.H. Gatzen |
| Published in | PRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2601.pdf |
