Concept for Performance-Enhancement of Ultra-Precision Dicing for Bulk Hard and Brittle Materials in Micro Applications by Laser Dressing
| Categories |
Konferenz (reviewed) |
| Year | 2012 |
| Authors | M. Stompe, P. v. Witzendorff, S. Cvetkovic, A. Moalem, U. Stute, L. Rissing |
| Published in | Microelectronic Engineering Journal (spec. issue), Proc. 37th Int. Conf. on Micro & Nanoeng., Berlin, Germany, Vol. 98, pp. 544-547 |
