Ultra-precision Dicing Process Separation: Effect of Circumferential and Sidewall Grinding
Categories |
Konferenz (reviewed) |
Year | 2012 |
Authors | M. Stompe, S. Cvetkovic, P. Taptimthong, L. Rissing |
Published in | Proc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 169-172 |