Institute of Micro Production Technology Research Publications
Ultra-precision Dicing Process Separation: Effect of Circumferential and Sidewall Grinding

Ultra-precision Dicing Process Separation: Effect of Circumferential and Sidewall Grinding

Categories Konferenz (reviewed)
Year 2012
Authors M. Stompe, S. Cvetkovic, P. Taptimthong, L. Rissing
Published in Proc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 169-172