Ultra-precision Manufacturing of Porcelain-based MEMS
| Categories |
Konferenz (reviewed) |
| Year | 2014 |
| Authors | M. Stompe, L. Rissing |
| Published in | Proc. 8th Int. Conf. & Exh. on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, Vienna 2014, Vienna, Austria, pp. 573-577 |
