Investigations on the Removal Mechanisms of Diverse Alumina Based Polishing Slurries for Chemical Mechanical Polishing of Electro-plated NiFe 45/55
| Categories |
Konferenz (reviewed) |
| Year | 2013 |
| Authors | J. Rittinger, S. Cvetkovic, L. Rissing |
| Published in | Microelectronic Engineering Journal, (spec. issue), Proc. 38th Int. Conf. on Micro & Nanoengineering, Toulouse, France |
