Investigations on the Removal Mechanisms of Diverse Alumina Based Polishing Slurries for Chemical Mechanical Polishing of Electro-plated NiFe 45/55
Categories |
Konferenz (reviewed) |
Year | 2013 |
Authors | J. Rittinger, S. Cvetkovic, L. Rissing |
Published in | Microelectronic Engineering Journal, (spec. issue), Proc. 38th Int. Conf. on Micro & Nanoengineering, Toulouse, France |