Investigations on Micromolds for Dispensing Low Viscosity Epoxies for MEMS Applications
Categories |
Konferenz (reviewed) |
Year | 2011 |
Authors | C. Leng, C. Ruffert, L. Rissing |
Published in | ECS Transactions, Vol. 33, Issue 34, Magnetic MEMS and Devices, pp. 81-92 |