Institute of Micro Production Technology Research Publications
Blade Wear and Sidewall Quality by Dicing of Sintered Silicon Carbide (SSiC)

Blade Wear and Sidewall Quality by Dicing of Sintered Silicon Carbide (SSiC)

Categories Konferenz (reviewed)
Year 2011
Authors M. Stompe, S. Cvetkovic, L. Rissing
Published in Proc. 11th Euspen International Conf. 2011, Como, Italy, pp. 333-336, 2011