Institute of Micro Production Technology Research Publications
Fabrication of MEMS on Printed Circuit Boards

Fabrication of MEMS on Printed Circuit Boards

Categories Zeitschriften/Aufsätze
Year 2011
Authors S. Cvetkovic, A. Wienecke, L. Rissing
Published in ECS Transactions, Vol. 33, Issue 34, Magnetic MEMS and Devices, 2011, pp. 69-80