Sputtering of SmCo Thin Films and Integration into a Ferrofluidic Microactuator
| Categories |
Konferenz (reviewed) |
| Year | 2011 |
| Authors | J. Chen, D. Hoheisel, L. Rissing |
| Published in | IEEE International Magnetics Conf. (Intermag 2011), Taipei, Taiwan, 2011 |
