Application of Sacrificial Layers fort he Modular Micro Sensor Fabrication on a Flexible Polymer Substrate
| Categories |
Konferenz (reviewed) |
| Year | 2011 |
| Authors | T. Griesbach, M. C. Wurz, L. Rissing |
| Published in | Proc. CD, Sensor + Test Conf. 2011 – Sensor, Opto, IRS2, Nuremberg, Germany |
| ISBN | 978-3-9810993-9-3 |
