Applying SU-8TM to the Fabrication of Micro Electro Discharge Machining Electrodes
Categories |
Konferenz (reviewed) |
Year | 2010 |
Authors | O. Traisigkhachol, H. Schmid, M. C. Wurz, H.H. Gatzen |
Published in | Microsystem Technologies, Springer Verlag, Berlin, Heidelberg, New York, Vol. 16, No. 8-9, pp. 1445-1450, 2010 |