Focused Ion Beam Core Hole Drilling for Stress Detection in Thin-films
| Categories |
Beiträge in Büchern |
| Year | 2009 |
| Authors | H. Gerdes, H.H. Gatzen |
| Published in | Microsystem Technologies, Springer Verlag Berlin, Heidelberg, New York, Vol. 15, No. 1, pp. 151-153 |
