Investigation of Fluidic Additives on the Nanohardness During Polishing
| Categories |
Konferenz (reviewed) |
| Year | 2009 |
| Authors | M.C. Wurz, F. Pape, M. Wark, H.H. Gatzen |
| Published in | Proc. WTC 09, Kyoto, Japan, K-331, pp. 698 |
